فرآیند تولید شیشه پوشش داده شده - پوشش دهی آفلاین مگنترون اسپاترینگ

1.Pre-production inspection: Check the resistance of deionized water for cleaning, the vacuum degree of the coating process chamber, target configuration, type, purity and pressure of process gases, working status of the cooling system, working status of automatic loading/unloading devices and cleaning machines, working status of production monitoring devices and online detection devices, working status of magnetron sputtering cathodes, etc.

2. Loading: Check the appearance quality, size, thickness, tin surface orientation of the glass, etc.

3. Pre-cleaning: The water temperature of the cleaning machine is controlled at 35 - 45°C. Deionized water is used in the final step to ensure that the glass surface is free of defects such as scratches, broken corners and water stains after cleaning. The drying air must be filtered.

4. Debugging: Set process parameters according to the standard sample and conduct trial production. The sample must meet indicators such as visible light transmittance, reflectance, color, color uniformity, emissivity of low-emissivity coated glass, and wear resistance. For magnetron sputtering coated glass that can be thermally processed, its thermal processing performance must also be evaluated.

5. Production process monitoring: Monitor the stability of process gases; detect the visible light transmittance, reflectance, color, color uniformity and emissivity of the coated glass; monitor the working voltage, current and power of the cathode; observe whether the cathode glow is stable; monitor the glass conveying process; conduct offline sampling inspection of products at specified frequencies.

6. Post-cleaning: Check the appearance quality of solar control coated glass and perform post-cleaning.